This article is about Face Seal Fittings, TP316L EP Technical Specification and technical specification based on international codes and standards of SEMI F20.
Face Seal Fittings, TP316L EP Technical Specification | SEMI F20
| Scope Description |
Face seal fittings, TP316L stainless steel with EP (electropolished) inner surface, in the following tube sizes: 1/8, 1/4, 3/8, 1/2, 3/4, 1 inch OD (outside diameter). Gaskets, unplated or silver-plated TP316L stainless steel, or unplated or silver-plated nickel. Gasket retainer assemblies shall be made available for sizes 1/4 to 1 inch OD. |
| Material Specification |
Fittings shall be Grade TP316L stainless steel per SEMI F20. |
| Dimensional Specification |
Inch OD Wall Thickness (Inch) |
| Purchase Order |
Purchase order (PO) shall specify the following: 1. Tube size 2. Gasket material [default: unplated nickel] 3. Gasket retainer type [default: no gasket retainer] 4. Surface roughness [default: ≤ 0.25 µm (10 microinch) Ra] 5. Melt process [default: AOD] 6. Manganese content [default: ≤ 2.00 %] 7. Certificate of Conformance requirements (See the Certification Section of this spec.) |
| Lengths | Fitting dimensions shall conform to supplier-provided cut sheets and drawings. |
| Tolerances |
Acceptance Criteria Inch OD OD Ovality Quantity to be Inspected Face Squareness 1/8 to 3/4 ± 0.5° 10% Wall Thickness All sizes ± 10% of nominal wall thickness 10% Fitting Dimensions All sizes ± 0.8 mm (1/32 inch) linear, 10% |
| Drawings | Supplier shall provide drawings that specify all dimensions of fittings. |
| Calculations | Not required |
| Mechanical Strength |
ASTM A 632 Grade TP316L (UNS S31603), DIN 17457/DIN 17458 |
| Welding | Orbital butt welded fittings shall be manufactured as EFW without added filler metal. |
| Heat Treatment |
Hardness shall be per ASTM A 269 for Grade TP316L (UNS S31603). |
| Inspection | Visual Inspection: All components shall be 100% visually inspected under bright white light to verify that the internal surfaces show no sign of surface imperfections (e.g., tool marks, draw marks, scratches, pits, graininess, orange peel, hazing, weld discoloration, spots, stains, residues) or visible particulate contamination. Dimensional Inspection: Components shall be dimensionally inspected for conformance to the acceptance criteria specified in the Tolerances Section of this specification. |
| Testing |
Surface Finish Testing: Parameter Acceptance Criteria Quantity Tested/Test Method Surface defect count ≤ 40 at 3500X ± 100X 0.5%/SEMASPEC 90120401B-STD Helium (He) Leak Testing: Inboard Leak Rate ≤ 1 x 10-9 sccs 100% of fittings with circumferential welds/ Particle Count Testing: Particles ≥ 0.20 micron 0 1 part per lot/ Gaseous Impurity Testing: Parameter Acceptance Criteria Quantity Tested/Test Method |
| Examination | None |
| Certification | Certified Test Report per ASTM A 450/A 450M (EN 10204, Type 3.1B in Europe) from the steel-producing mill shall be submitted for each mill heat utilized. Certificate of Conformance: A Certificate of Conformance shall be submitted with each shipment of purchased components. The certificate shall include supplier verification that components conform to specification requirements. For all orders, certificate shall include verification of the following: • Helium leak testing performed on 100% of welded components • Visual Inspection performed on 100% of components • Dimensional inspection performed on 10% of components • Cleaning performed on 100% of components; also note Cleaning Specification revision number and date • Double-bag packaging performed on 100% of components • Note Air Products purchase order number, supplier lot number, mill heats utilized to fill order, shipping order number, date, and signature of supplier’s Quality Control Representative When specified in the PO, certificate shall include verification of the following: • Surface finish testing performed • Particle count testing performed • Gaseous impurity testing performed |
| Marking | All fittings shall be marked as follows: • Manufacturer’s name or unique symbol • “TP316L” • Serial number or lot number • Heat number • Part number |
| Protection | None |
| Color Coding | Not required |
| Packing | Packaging: Packaging shall be performed in a Class 100 cleanroom or clean zone. Each component shall be purged prior to capping using 99.999% pure, 0.01 micron filtered nitrogen. Both ends shall be sealed by pressing polyethylene caps over 45 micron (1.75 x 10-3 inch) thick polyamide squares. Then each component shall be double bagged in 150 micron (6 x 10-3inch) thick polyethylene sleeves or bags. Each bag shall be independently vacuum sealed or purged. When purge sealing, purge gas shall be entrapped inside each bag prior to sealing.Shipment Packing: Components shall be packed for shipment so that damage will not occur to the double bagging or components. All shipments of 25 kilograms (50 pounds) or greater shall be packaged inside wooden crates or plastic cases. Components shall be packed in the crate/case using shock-absorbing spacers and keepers. Voids shall be filled with shock-absorbing materials. The supplier shall guarantee quality and cleanliness upon delivery to Air Products. Any component that is received by Air Products in a damaged condition shall be returned and replaced, all at the supplier’s expense. Damage also includes a torn bag and loss of purge gas environment. |
| Special Requirements |
Electropolishing: After heat treatment (and any subsequent welding, bending, or forming), all inner surfaces shall be electropolished to the acceptance criteria defined in the Testing Section of this specification.
Final surface passivation: After electropolishing, surfaces shall be passivated. Suggested passivation method is soaking in nitric acid (20% to 50% concentration) for ≥ 30 minutes. Cleaning: After final surface passivation, cleaning shall be performed in a Class 100 cleanroom or clean zone. Cleaning of tube and fittings shall be performed per supplier’s Cleaning Specification. A final rinse shall be made with deionized water, and the effluent shall be monitored for resistivity. The acceptable resistivity level is ≥ 17.5 megaohm-cm. Step 1: Wash by submerging in multi-stage continuous counter-flowing deionized water baths. Final rinse with a 60°C (140°F) deionized water spray. Step 2: Dry by purging with 99.999% pure, 0.01 micron filtered, 60°C (140°F) nitrogen. For fittings, bake off residual moisture by using a vacuum oven or a heat lamp. |
